玻璃基板在多孔质面节流气体支承状态下稳定性实验研究

Experimental Study of the Stability of Glass Substrates in a Porous Textured Surface Throttled Gas Supported State

摘要: 气浮支承技术是大型液晶玻璃基板生产和光学自动检测仪器中的关键技术之一。为了适应高清显示技术快速发展的趋势，本文提出一种用于玻璃基板的新型多孔质节流面板静压气体支承系统，建立了多孔质节流面板静压气浮支承系统的物理模型。通过与多孔质节流气体支撑进行对比实验，验证了多孔质面节流气体支承相对于传统多孔质节流气体支承能够更有效地改善玻璃基板的稳定性。在此基础上，分别测量了多孔质材料透气率与多孔质材料厚度在不同情况下对多孔质面节流气体支承稳定性的影响，结果表明在多孔材料渗透率为3 × 10⁻¹⁴ m²且在厚度为3 mm时，气膜稳定性较好，玻璃基板振幅可达到0.13 μm。

Abstract: Gas float support technology is one of the key technologies in the production of large liquid crystal glass substrates and optical automatic inspection instruments. In order to adapt to the trend of rapid development of high-definition display technology, this paper proposes a new type of porous mass throttled panel hydrostatic gas support system for glass substrates, and establishes a physical model of porous mass throttled panel hydrostatic gas float support system. Through comparison experiments with the porous mass throttling gas support, it is verified that the porous mass face throttling gas support can improve the stability of the glass substrate more effectively compared with the traditional porous mass throttling gas support. On this basis, the effects of porous material permeability and porous material thickness on the stability of the porous surface throttling gas support in different cases were measured, and the results show that the gas film stability is better when the permeability of the porous material is 3 × 10⁻¹⁴ m² and at a thickness of 3 mm, the amplitude of the glass substrate can be reached 0.13 μm.