不同槽口曲线对双连孔力传感器静动态性能的影响

Influence of Different Notch Curves of Dou-ble-Hole Force Sensor on Its Static and Dy-namic Properties

摘要: 力传感器量程和灵敏度间的相互制约关系可利用应力集中效应进行解决，为探究不同形状的应力集中程度，进而对传感器静动态性能的影响，本文构建了四种不同槽口曲线的双连孔弹性体结构，使用有限元软件分析了在相同测力方向载荷下的应力和应变情况，结果表明在力敏单元的槽口长度、深度和最薄处厚度相同的前提下，当槽口曲线为圆弧时，弹性体结构的等效应力最小，应变片布片路径上的正向线弹性应变最大，力传感器的量程更大，输出灵敏度更高，最后对四种结构进行了模态分析，得到了不同槽口曲线传感器的最佳工作带宽，研究工作可为高性能力传感器的设计提供一定的参考价值。

Abstract: The equilibrium relationship between range and sensitivity of the force sensor can be solved by the principle of stress concentration. To explore the influence of stress concentration of different notch shapes on their static and dynamic properties of sensors, four double-hole structures with conic notch curve are constructed, and the equivalent stress and normal elastic strains of under the same load were analyzed by finite element software. Results indicate that with the same notch length, depth and the thickness of the thinnest part of force-sensitive element, when double-hole structure with circular notch curve, the equivalent stress is the minimized, and normal elastic strain is the maximize. The force sensor with circular notch curve has a larger range and higher output sensitiv-ity. Finally, the optimal working bandwidth of the sensors with different notch curves is obtained by modal analysis of four structures. The research work can provide a certain reference value for de-signing high-performance force sensors.