可见光近红外波段宽带增透膜研究

Research on Broadband Antireflection Coat-ings in the Visible and Near-Infrared Spectral Ranges

摘要: 增透膜技术在各个领域的广泛应用无可否认，从日常生活中的眼镜镀膜到国家安全领域的武器系统，增透膜的重要性不断凸显。随着科技的进步和应用需求的不断提高，人们对增透膜性能的要求也越来越高。本研究通过分析增透膜理论，采用光学设计工具TFCalc软件，运用高低折射率材料的交替堆叠的膜系设计方法，利用单纯形法和针插法优化膜系结构，通过材料对比选择钠钙玻璃作为基底材料，选择TiO2、SiO2、Al2O3以及MgF2作为薄膜材料，设计了一种在400~1100 nm波段平均透过率99.0%以上的宽带增透膜，其中在400 nm处最大透过率为99.92%，1100 nm处最小透过率为99.11%。最后从膜层厚度变化和入射角度方面进行了膜层透过率的误差分析，并提出了可接受范围的误差值。

Abstract: The wide-ranging applications of antireflection coating (AR coating) technology across various fields are undeniable, from the everyday use of eyeglass coatings to the crucial role it plays in national security systems. As technology advances and application demands continue to rise, the require-ments for the performance of AR coatings are becoming increasingly stringent. In this study, we conducted a comprehensive analysis of AR coating theory. We employed optical design software, TFCalc, and utilized a film stack design approach that involved the alternation of high and low re-fractive index materials. We further optimized the film stack structure using the simplex method and the needle optimization technique. To enhance the coating’s performance, we carefully selected the substrate material, sodium calcium glass, in comparison to several other materials. Additionally, we chose TiO2、SiO2、Al2O3 and MgF2as the thin-film materials. These materials allowed us to design a broadband AR coating with an average transmittance exceeding 99.0% over the spectral range of 400~1100 nm. Notably, the maximum transmittance reached 99.92% at 400 nm, while the mini-mum transmittance was 99.11% at 1100 nm. Finally, an error analysis of the film transmittance was conducted in terms of the change in film thickness and incident angle, and an acceptable range of error values was proposed.