磁控溅射沉积Ni-DLC涂层摩擦磨损性能研究及预测
Research and Prediction of Friction and Wear Properties of Magnetron Sputtering Deposition Ni-DLC Coatings
DOI: 10.12677/mos.2024.134396, PDF,    国家自然科学基金支持
作者: 石青松, 徐红玉, 王晓强：河南科技大学机电工程学院，河南 洛阳
关键词: 磁控溅射；指数回归；摩擦磨损性能；Ni-DLC涂层；风电轴承；Magnetron Sputtering； Exponential Regression； Friction and Wear Properties； Ni-DLC Coating；Wind Power Bearings
摘要: 为提高风电轴承的摩擦磨损性能、延长使用寿命，从而降低运维成本，以硬度、摩擦系数和磨损率为摩擦磨损性能的评价指标。在42GrMo钢基体使用非平衡磁控溅射沉积技术沉积Ni-DLC复合涂层，对复合涂层进行摩擦磨损实验和划痕实验，测试涂层的硬度、摩擦系数和磨损率，控制磁控溅射工艺参数研究其对评价指标的影响规律。基于正交实验，建立指数回归预测模型和BP神经网络预测模型，通过实验验证了指数回归预测模型具有较好的精度，可指导实际生产，具有一定的理论意义。
Abstract: In order to improve the friction and wear performance of wind power bearings, prolong the service life, and reduce the operation and maintenance costs, the hardness, friction coefficient and wear rate are the evaluation indicators of friction and wear performance. The non-equilibrium magnetron sputtering deposition technology was used to deposit the Ni-DLC composite coating on the 42GrMo steel matrix, and the friction and scratch tests were carried out on the composite coating to test the hardness, friction coefficient and wear rate of the coating, and the magnetron sputtering process parameters were controlled to study its influence on the evaluation index. Based on orthogonal experiments, the exponential regression prediction model and the BP neural network prediction model are established, and the exponential regression prediction model is verified by experiments to have good accuracy, which can guide the actual production, which has certain theoretical significance.
文章引用：石青松, 徐红玉, 王晓强. 磁控溅射沉积Ni-DLC涂层摩擦磨损性能研究及预测[J]. 建模与仿真, 2024, 13(4): 4381-4394. https://doi.org/10.12677/mos.2024.134396

参考文献

[1] 张永辉, 杨欣可, 吴雪龙, 等. 屋顶光伏发电效率提升技术研究及应用[J]. 电工电气, 2023(10): 72-73.
[2] Chen, Y., Li, H., Su, F., Ma, G., Li, Q., Sun, J., et al. (2024) Friction and Wear Behavior of Molybdenum-Disulfide Doped Hydrogen-Free Diamond-Like Carbon Films Sliding against Al2O3 Balls at Elevated Temperature. Wear, 544, Article ID: 205296. [Google Scholar] [CrossRef] 
[3] Pillaca, E.J.D.M., Correia, R.F.B.d.O., Martins, G.V., Ferreira, S.R., da Silva, T.F., Rodrigues, C.L., et al. (2024) Preparation of Boron-Doped Diamond-Like Carbon Films via Enhanced-PECVD Using an Additional Cathode. Surface and Coatings Technology, 478, Article ID: 130432. [Google Scholar] [CrossRef] 
[4] Jia, Y., Sun, W., Zhang, Y., Xiao, Y., Zhang, C. and Liu, J. (2023) Effect of rGO Concentration on the Microstructure and Friction Behavior of Co-Doped Diamond-Like Carbon (NI/N/rGO-DLC) Films. Diamond and Related Materials, 137, Article ID: 110112. [Google Scholar] [CrossRef] 
[5] Jin, L., Li, Y., Liu, C., Fan, X. and Zhu, M. (2023) Friction Mechanism of DLC/MAO Wear-Resistant Coatings with Porous Surface Texture Constructed in-Situ by Micro-Arc Oxidation. Surface and Coatings Technology, 473, Article ID: 130010. [Google Scholar] [CrossRef] 
[6] Zhang, S., Wu, S., Huang, T., Yang, X., Guo, F., Zhang, B., et al. (2023) The Effects of Ti/Ni Doping on the Friction and Wear Properties of DLC Coatings. Coatings, 13, Article 1743. [Google Scholar] [CrossRef] 
[7] Vahidi, A., Serra, R., Ferreira, F., Cavaleiro, A. and Oliveira, J. (2023) Assessment of Thermomechanical Stability of DLC Films Deposited by Ne-HiPIMS Technology for High-Temperature Applications. Wear, 532, Article ID: 205126. [Google Scholar] [CrossRef] 
[8] 胡杨, 何沐阳. MoS2掺杂DLC薄膜对力学性能及摩擦学行为的影响[J]. 陶瓷学报, 2023, 44(5): 947-953.
[9] 冯兴国, 郑玉刚, 汪科良, 等. 二硫化钼薄膜在不同摩擦副条件下的摩擦学性能研究[J]. 真空与低温, 2024, 30(1): 31-38.
[10] 魏晨阳, 白琴, 郭鹏, 等. HiPIMS占空比对Al合金表面Ti/DLC涂层力学和摩擦性能的影响[J]. 中国表面工程, 2023, 36(4): 77-88.
[11] 孔维程. 渗氮钛合金表面沉积Cr-DLC涂层微观组织和性能研究[D]: [硕士学位论文]. 上海: 东华大学, 2023.
[12] 杜广煜, 梁笑瑜, 万亿, 等. 不同温湿度下风电轴承表面防护DLC薄膜微动摩擦特性[J]. 轴承, 2023(6): 89-95.
[13] 聂朝胤, 谢红梅, 杨娟, 等. 非平衡磁控溅射Ti掺杂类金刚石薄膜的基本特性[J]. 材料热处理学报, 2008, 29(3): 147-151.
[14] 李昌恒, 刘奎仁, 魏世丞, 等. 磁控溅射技术制备氮化钛薄膜的研究进展[J]. 材料保护, 2023, 56(2): 111-119.
[15] 常德龙, 谢青, 胡伟华, 等. 磁控溅射法薄木镀膜金属工艺参数的遴选[J]. 东北林业大学学报, 2016, 44(6): 75-78.
[16] 王会强. 铝合金表面磁控溅射ZrN、TiN、TiCN彩色纳米薄膜工艺的研究[D]: [博士学位论文]. 保定: 河北农业大学, 2014.

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