阳极氧化制备TiO₂多孔薄膜及其气敏传感特性研究

Preparation of TiO₂Porous Film by Anodic Oxidation and Its Gas Sensing Properties

摘要: 二氧化钛(TiO₂)是一种气敏传感材料，受到比表面积小的影响，TiO₂薄膜型气敏传感器的性能普遍不理想。本研究采用阳极氧化制备了TiO₂多孔薄膜，以改善其气敏传感特性。SEM观察发现工作电压是影响TiO₂多孔薄膜形貌的关键因素：在醇溶液体系中，45~60 V是制备TiO₂多孔薄膜的理想工作电压。研究还发现，0.05 mm的Ti片更有利于获得大孔径的TiO₂多孔薄膜。XRD和Raman光谱都证实所制备的样品是TiO₂多孔薄膜，同时Raman光谱也确认了Pt修饰能够显著增强其光谱性能。气敏传感特性表明Pt修饰后TiO₂多孔薄膜具有更加优异的气敏传感性能。

Abstract: Titanium dioxide (TiO₂) is a kind of gas sensing material, which is affected by the small specific surface area. The performance of TiO₂ thin film gas sensor is generally not ideal. In this study, TiO₂ porous films were prepared by anodic oxidation to improve its gas sensing properties. SEM observation shows that the working voltage is the key factor affecting the morphology of TiO₂ porous films. In the alcohol solution system, 45~60 V is the ideal working voltage for the preparation of TiO₂ porous films. It is also found that 0.05 mm thick Ti sheet is more conducive to obtain large pore size TiO₂ porous film. Both XRD and Raman spectra confirmed that the prepared samples were TiO₂ porous films, and it was also confirmed that Pt modification could significantly enhance their spectral properties. The gas sensing properties show that the Pt modified TiO₂ porous film has more excellent gas sensing properties.