金属电学探针高温接触传热特性研究

Study of High Temperature Contact Heat Transfer Characteristics of Metallic Electrical Probes

摘要: 探针台广泛应用于半导体行业、光电行业和集成电路的电学性能测试。在航空航天等特殊的情况下，有些材料需要承受较高的温度。高温的环境下，材料的电性能测试需要用到高温探针台，金属电学探针的高温物理性能对测试结果会产生影响。因此，为了确保在高温环境下高温探针台可以精准测量材料的物理性能，对高温探针台中金属探针的传热特性进行研究十分有必要。研究结果表明镀金钨钢材料的金属探针远离针尖部分的温度随与高温接触的时间增加呈非线性上升关系。电学探针高温接触传热中，距离针头越近的位置温度变化较快，随着加热时间增加，在接触时间接近5秒后整个金属电学探针温度趋于稳定。因此，实际应用时，可通过预加热方式减小温度分布不均匀影响。本文的研究可以为电子材料和器件高温性能的优化测试提供基础。

Abstract: Probe tables are widely used in the semiconductor industry, optoelectronics industry and integrated circuits for testing electrical properties. In special cases such as aerospace, some materials need to withstand higher temperatures. The high temperature environment requires the use of high temperature probe stations for testing the electrical properties of materials, and the high temperature physical properties of metal electrical probes can have an impact on the test results. Therefore, in order to ensure that the high-temperature probe stage can accurately measure the physical properties of materials in a high-temperature environment, it is necessary to study the heat transfer characteristics of metal probes in the high-temperature probe stage. The results of the study show that the temperature of the metal probe of gold-plated tungsten steel material away from the tip portion of the probe increases nonlinearly with the increase of the time of contact with high temperature. Electrical probe high-temperature contact heat transfer, the closer the location of the needle temperature changes faster, with the increase in heating time, in the contact time close to 5 seconds after the entire metal electrical probe temperature tends to stabilize. Therefore, in practical applications, the effect of uneven temperature distribution can be reduced by preheating. The research in this paper can provide a basis for the optimized testing of high temperature performance of electronic materials and devices.