热丝CVD法大批量制备金刚石涂层刀具工艺的温度场仿真优化
Simulation and Optimization of the Temperature Field for Mass Production of Diamond-Coated Tools via Hot-Filament Chemical Vapor Deposition
摘要: 本文针对热丝化学气相沉积法(HFCVD)技术批量制备金刚石涂层刀具的质量均匀性，通过模拟分析了基体温度场分布。利用正交实验设计，研究了热丝高度(H)、热丝间距(D)和热丝长度(L)三个热丝排布参数对基体温度分布的影响。仿真结果显示，通过调节热丝长度和热丝间距可以有效地改善刀尖平面的温度均匀性；而调节热丝高度则可以改善刀具排屑槽区域的温度均匀性。通过仿真确定了最优的热丝参数组合为：热丝长度L = 270 mm、热丝高度H = −10 mm、热丝间距D = 25 mm。沉积实验的结果表明，优化后的参数能够产生均匀的温度场，从而制备出晶粒尺寸和厚度均匀的高质量金刚石涂层。
Abstract: Our study investigates how to achieve consistent quality in high-throughput diamond-coated tools production via Hot Filament Chemical Vapor Deposition (HFCVD), focusing on the substrate temperature distribution. Through orthogonal experimental design, we examine the effects of filament height (H), spacing (D), and length (L) on temperature distribution. Our simulations revealed that filament length and spacing adjustments enhance temperature uniformity at the tool tip, while filament height adjustments benefit the chip groove area’s temperature uniformity. We found the optimal filament settings are a length of 270 mm, a height of −10 mm, and a spacing of 25 mm. Our experimental results confirmed that these optimized parameters create a uniform temperature distribution, leading to high-quality diamond coatings with consistent grain size and thickness.
文章引用：阮宇翔. 热丝CVD法大批量制备金刚石涂层刀具工艺的温度场仿真优化[J]. 应用物理, 2024, 14(12): 779-788. https://doi.org/10.12677/app.2024.1412084

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