基于COMSOL的飞秒激光烧蚀TC4仿真研究
Simulation of TC4 Ablation by Femtosecond Laser Based on COMSOL
DOI: 10.12677/mos.2025.142130, PDF,   
作者: 宋宇阳：上海理工大学机械工程学院，上海
关键词: 双温模型；TC4；正交试验；Two-Temperature Model； TC4； Orthogonal Test
摘要: 飞秒激光不同于传统连续激光，它具有脉宽极窄、峰值功率高等特点，能够实现对材料的无热熔处理。由于其刻蚀精度高、加工区域小且可控，常常被用作超精细加工。为探究飞秒激光加工过程中激光能量密度、光斑半径、激光脉宽对烧蚀直径的影响，本文基于双温模型，利用COMSOL有限元仿真软件，建立二维轴对称模型，求解TC4烧蚀阈值，验证了模型的准确性，然后通过正交试验法，分析了不同激光参数对TC4烧蚀深度的影响。
Abstract: Femtosecond laser is different from traditional continuous laser, it has the characteristics of extremely narrow pulse width, high peak power, and can realize the non-hot melt treatment of materials. Because of its high etching precision, small and controllable processing area, it is often used as a hyperfine machining. In order to explore the influence of laser energy density, spot radius and laser pulse width on ablation diameter during femtosecond laser processing, based on the two-temperature model, COMSOL finite element simulation software was used to establish a two-dimensional axisymmetric model, solve the TC4 ablation threshold, and verify the accuracy of the model. Then, through orthogonal test method, the influence of different laser parameters on the ablation diameter of TC4 was analyzed.
文章引用：宋宇阳. 基于COMSOL的飞秒激光烧蚀TC4仿真研究[J]. 建模与仿真, 2025, 14(2): 47-55. https://doi.org/10.12677/mos.2025.142130

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