双摆式动镜干涉仪的设计
Design of Interferometer Based on Pendulum Movable Mirror
DOI: 10.12677/iae.2025.131006, PDF,   
作者: 石 磊*：天津大学精密仪器与光电子工程学院，天津；天津捷强动力装备股份有限公司，天津；孙长库：天津大学精密仪器与光电子工程学院，天津；夏恒新, 李岩松：天津捷强动力装备股份有限公司，天津
关键词: FTIR；干涉仪；双摆式动镜；仪器设计；FTIR； Interferometer； Double Pendulum Moving Mirror； Instrument Design
摘要: 用于工业现场的傅里叶变换红外光谱仪往往要求具备与实验室设备相近的性能指标，且对体积、重量、抗震等方面的要求更为严格。在完美地利用立体角镜与平面折返镜组合的光学特性基础上，设计了一种高效稳定双摆式的干涉仪结构，能够从原理上解决干涉仪调制度稳定性的问题。通过对动镜扫描系统的分析建模，建立动镜扫描速度与驱动器之间的数学关系，并利用数字信号处理器实现对其的闭环控制，使扫描误差大约在±0.2%的范围内。通过对仪器性能的测试以及标准样品的测试表明，仪器具有较高的信噪比与稳定性，能够满足工业应用的需求。
Abstract: When FTIR is used in industrial applications, it often requires performance similar to laboratory equipment, and is more stringent in terms of volume, weight, and seismic resistance. A highly efficient and stable pendulum structure interferometer based on the combination of cube corner mirror and planar retro-mirror was designed, the combination of cube corner mirror and flat retro-mirror is a perfect solution for interferometer modulation depth issues, because of their own optical characteristics, in principle, tilts and shift would have no effect on the modulation depth. Through the analysis and modeling of the moving mirror scanning system, the mathematical relationship between the scanning speed and the driver is established, and a closed-loop control is realized by using the digital signal processor so that the scanning error is about ± 0.2%. Through the test of the performance of the instrument and the test of some standard samples shows that the instrument has a good signal to noise ratio and stability, to meet the needs of industrial applications.
文章引用：石磊, 孙长库, 夏恒新, 李岩松. 双摆式动镜干涉仪的设计[J]. 仪器与设备, 2025, 13(1): 38-45. https://doi.org/10.12677/iae.2025.131006

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