室温柔性In₂O₃薄膜的制备及其气敏性能

Preparation of Flexible In₂O₃ Films at Room Temperature and Their Gas-Sensitive Properties

摘要: 本文报道了一种制备柔性甲醛传感器的简单合成策略，具有广阔的应用前景。以立方氧化铟纳米颗粒为敏感材料，采用简单的自旋镀膜工艺在聚酰亚胺薄膜上制备了甲醛传感器。实验结果表明，所设计的柔性甲醛传感器在室温下具有较高的活性和重复性，甲醛的检测限达到10 ppm。通过对器件的长时间监测，在大角度和循环弯曲下，器件的灵敏度变化不大，最大和最小灵敏度响应变化为1.66。从立方氧化铟纳米颗粒、芳香族聚酰亚胺的结构优势、光加成的催化作用等方面探讨了甲醛传感器的传感机理。这种传感器具有灵活、传感材料设计灵活、重量轻、成本低等优点，并能在室温下检测气体等，在环境气体检测、可穿戴智能医疗等领域有着广阔的应用前景。综上所述，本研究为制造高性能、适用性强的甲醛传感器提供了一条有效途径，为进一步应用于环境甲醛检测等应用场景提供了参考。

Abstract: Here, we report a simple synthesis strategy for the preparation of flexible formaldehyde sensors with broad application prospects. A formaldehyde sensor was constructed on polyimide film by a simple spin coating process using cubic indium oxide nanoparticles as the sensitive material. The experimental results show that the designed flexible formaldehyde sensor has high activity and repeatability at room temperature, and the detection limit of formaldehyde reaches 10 ppm. By monitoring the device for a long period of time, the sensitivity of the device changes little under large Angle and cyclic bending, and the maximum and minimum sensitivity responses change 1.66. The sensing mechanism of formaldehyde sensor was discussed from the aspects of cubic indium oxide nanoparticles, structural advantages of aromatic polyimide and catalytic effect of light addition. This kind of sensor has the advantages of flexibility, flexible sensing material design, light weight and low cost, and can detect gas at room temperature, etc., and has broad application prospects in the field of environmental gas detection and wearable smart medical treatment. In conclusion, this study provides an effective way to manufacture high-performance and applicable formaldehyde sensors, which may be helpful for further application in environmental formaldehyde detection and other application scenarios.