多种技术协同作用在半导体级超净高纯湿电子化学品制备中的应用研究

Research on the Application of Multi-Technology Synergy in the Production of Semiconductor-Grade Ultra-Clean High-Purity Wet Electronic Chemicals

摘要: 本文提出一种基于精馏分离、电析与吸附协同作用的超净高纯湿电子化学品制备新工艺，通过电化学析出与吸附材料的协同效应，实现对金属离子、颗粒物及有机杂质的高效去除。实验表明，该技术可将湿电子化学品纯净度提升至SEMI (All American Semiconductor, Inc.)标准的G5或C12级别(金属杂质 ≤ 10 ppt)，同时降低能耗30%以上，为半导体行业关键材料国产化提供技术支撑。

Abstract: This article proposes a new process for preparing ultra-clean and high-purity wet electronic chemicals based on the synergistic effect of distillation separation, electro-precipitation, and adsorption. Through the synergistic effect of electrochemical precipitation and adsorption materials, efficient removal of metal ions, particulate matter, and organic impurities is achieved. Experimental findings indicate that this technology enables wet electronic chemicals to attain purity levels corresponding to SEMI (All American Semiconductor, Inc.) G5 or C12 grade (metallic impurities ≤ 10 ppt), while reducing energy consumption by more than 30%, providing technical support for the localization of key materials in the semiconductor industry.