基于同步双矢量源表架构的高精度电容测量系统设计

Design of a High-Precision Capacitance Measurement System Based on a Synchronous Dual-Vector Source Meter Architecture

摘要: 为实现对电容的高分辨率、多频点测量，本文搭建了一套基于数字双通道锁相的同步双矢量源表构架的平衡电桥装置。该装置能够调平电桥并测试电桥各部分电压电流，从而计算得到电容值。实验证明，该电容测量系统在100~1 MHz频率下，可以做到最小对0.1 pF电容进行连续测量。与是德阻抗测量仪器相比，可达到万分之五以内的精度误差。

Abstract: A balanced bridge device based on a digital dual-channel phase-locked synchronous dual-vector source meter architecture was constructed to achieve high-resolution and multi-frequency-point capacitance measurements. This device is capable of balancing the bridge circuit and measuring the voltage and current across various components of the bridge, enabling the calculation of capacitance values. Experimental results demonstrate that the capacitance measurement system is capable of performing continuous measurements on capacitors as small as 0.1 pF across a frequency range from 100 Hz to 1 MHz. When compared with Keysight impedance measurement instruments, the system achieves an accuracy error within 0.05%.