基于一维光栅的二维光学细分方法研究
Research on Two-Dimensional Optical Subdivision Method Based on One-Dimensional Grating
DOI: 10.12677/iae.2025.133038, PDF,   
作者: 苏思宁：沈阳工业大学信息科学与工程学院，辽宁 沈阳
关键词: 透射光栅；ZEMAX仿真；光学细分；二维测量；Transmission Grating； ZEMAX Simulation； Optical Subdivision； Two-Dimensional Measurement
摘要: 本文针对利特罗角入射式传统二维高细分光栅系统依赖二维光栅的技术限制，设计了一种基于外差干涉和利特罗角入射方式的光路结构，实现了8倍光学细分及x、z向位移同步检测。经ZEMAX软件对光路结构建模仿真验证，成功获得干涉条纹并证实系统可行性。并根据仿真参数进行实物搭建获得干涉信号，验证了细分系统的工业有效性。该光学结构利用一维光栅实现高光学细分双向测量，摆脱了对二维光栅的设计依赖，为精密制造行业提供了兼具高细分、多维度、低成本的创新光栅细分结构。
Abstract: This study addresses the technical limitations of conventional two-dimensional high-subdivision grating systems that rely on two-dimensional gratings in Littrow-angle configurations. A novel optical architecture based on heterodyne interferometry and Littrow angle incidence was designed, achieving 8-fold optical subdivision while enabling simultaneous detection of x- and z-axis displacements. Through ZEMAX-based modeling and simulation of the optical path, interference fringe patterns were successfully obtained, confirming the system’s theoretical feasibility. Subsequent prototype implementation guided by simulation parameters demonstrated measurable interference signals, verifying the industrial applicability of this subdivision system. By employing one-dimensional gratings to realize bidirectional high-resolution measurement, this optical configuration eliminates dependence on specialized two-dimensional grating designs, providing precision manufacturing industries with an innovative grating subdivision architecture that combines enhanced resolution, multidimensional measurement capability, and cost-effectiveness.
文章引用：苏思宁. 基于一维光栅的二维光学细分方法研究[J]. 仪器与设备, 2025, 13(3): 300-307. https://doi.org/10.12677/iae.2025.133038

参考文献

[1] 邢旭. 低周期非线性误差外差光栅干涉测量技术研究[D]: [博士学位论文]. 哈尔滨: 哈尔滨工业大学, 2020.
[2] 尹云飞, 刘兆武, 于宏柱, 等. 二维光栅位移测量技术综述[J]. 中国光学, 2020, 13(6): 1224-1238.
[3] Goudarzi Khouygani, M.H. and Jeng, J. (2020) High-Precision Miniaturized Low-Cost Reflective Grating Laser Encoder with Nanometric Accuracy. Applied Optics, 59, 5764-5771. [Google Scholar] [CrossRef] [PubMed]
[4] Yin, Y., Liu, Z., Jiang, S., Wang, W., Yu, H., Li, W., et al. (2021) Grating-Based 2D Displacement Measurement with Quadruple Optical Subdivision of a Single Incident Beam. Optics Express, 29, 24169-24181. [Google Scholar] [CrossRef] [PubMed]
[5] Yu, H., Chen, X., Liu, C., Cai, G. and Wang, W. (2021) A Survey on the Grating Based Optical Position Encoder. Optics & Laser Technology, 143, Article 107352. [Google Scholar] [CrossRef] 
[6] Sha, Q., Qiu, S., Liu, T., Wang, W. and Ren, Y. (2021) Doppler Effect of Polarization Grating. Applied Optics, 60, 2788-2794. [Google Scholar] [CrossRef] [PubMed]
[7] Shimizu, Y., Ishizuka, R., Mano, K., Kanda, Y., Matsukuma, H. and Gao, W. (2021) An Absolute Surface Encoder with a Planar Scale Grating of Variable Periods. Precision Engineering, 67, 36-47. [Google Scholar] [CrossRef] 
[8] Chang, D., Hu, P. and Tan, J. (2021) Fused-Like Angles: Replacement for Roll-Pitch-Yaw Angles for a Six-Degree-Of-Freedom Grating Interferometer. Frontiers of Information Technology & Electronic Engineering, 22, 1677-1684. [Google Scholar] [CrossRef] 
[9] 林存宝. 外差干涉纳米级光栅位移测量系统关键技术研究[D]: [博士学位论文]. 长沙: 国防科学技术大学, 2016.
[10] 乔德成. 三自由度光栅位移测量关键技术研究[D]: [硕士学位论文]. 哈尔滨: 哈尔滨工业大学, 2019.
[11] 康森, 熊显名, 王鹏, 等. 基于利特罗角的8细分光栅干涉仪读头设计[J]. 重庆: 激光杂志, 2022, 43(5): 38-42.
[12] Xie, Y., Jia, W., Xiang, C., Sun, P., Wei, C. and Zhou, C. (2021) High-Efficiency Polarization-Independent Gold-Coated Crossed Grating under Normal Incidence. Optics Communications, 483, Article 126669. [Google Scholar] [CrossRef] 
[13] Zhang, W., Wang, Y., Hao, D., et al. (2020) High-Precision Displacement Measurement Model for the Grating Interferometersystem. Optical Engineering, 59, 1. [Google Scholar] [CrossRef] 
[14] 陈洪芳, 汤亮, 石照耀, 等. 基于双波长法补偿空气折射率的激光追踪系统ZEMAX仿真方法[J]. 中国激光, 2019, 46(1): 232-239.
[15] 林晓阳. ZEMAX光学设计超级学习手册[M]. 北京: 人民邮电出版社, 2014.
[16] 郁道银, 谈恒英. 工程光学[M]. 北京: 机械工业出版社, 2002.

为你推荐