气溶胶直写实验研究

Experimental Research on Aerosol Direct Writing

摘要: 气溶胶直写技术(Aerosol Jet Direct Writing)作为一种高分辨率非接触式图案沉积方法，在柔性电子与微纳器件制造中展现出巨大潜力。然而，直写分辨率与图案质量在很大程度上受限于气溶胶射流在喷头内聚焦行为的影响，该过程中的多物理场耦合机制尚不明确。本文通过自主搭建气溶胶直写实验平台，系统研究了载气与鞘气流速对直写形貌与分辨率的定量影响。研究结果表明，载气和鞘气是主导射流聚焦效果的关键因素。载气流速为0.5 mL/min时，将鞘气流速从0.5 mL/min提升至0.7 mL/min，可获得最优的聚焦效果，此时聚焦比为1.3，聚焦率为40%，且边缘清晰度得到改善。该研究为优化气溶胶直写工艺参数提供了明确的实验依据，对推进该技术在微细图形制造中的应用具有重要指导意义。

Abstract: Aerosol Jet Direct Writing technology, as a high-resolution non-contact pattern deposition method, has shown great potential in the manufacturing of flexible electronics and micro/nano devices. However, the direct writing resolution and pattern quality are largely limited by the focusing behavior of aerosol jets inside the nozzle, and the multi physics coupling mechanism in this process is not yet clear. This article systematically studied the quantitative effects of carrier gas and sheath gas flow rates on the morphology and resolution of direct writing by building an aerosol direct writing experimental platform independently. The research results indicate that the carrier gas and sheath gas are the key factors that dominate the focusing effect of the jet. When the carrier gas flow rate is 0.5 mL/min, increasing the sheath gas flow rate from 0.5 mL/min to 0.7 mL/min can achieve the optimal focusing effect, with a focusing ratio of 1.3, a focusing rate of 40%, and improved edge clarity. This study provides clear experimental evidence for optimizing aerosol direct writing process parameters and has important guiding significance for promoting the application of this technology in micrographic manufacturing.