基于LabVIEW的电涡流传感器动静态一体化校准系统开发

Development of an Integrated Dynamic and Static Calibration System for Eddy Current Sensors Based on LabVIEW

摘要: 电涡流传感器在长期使用过程中，可能会因为老化或者受客观环境的影响，指示值会出现很大的误差甚至错误，所以需要根据电涡流传感器的性能定期地对其进行动态或者静态校准，及时发现并处理电涡流传感器存在的问题，校准时，感应盘使用被校准传感器实际工况中所感应的金属导体材料制成，这样来保证电涡流传感器测量结果的准确性，校准周期一般不超过一年。对于电涡流传感器的校准，主要分静态校准和动态校准。本文基于LabVIEW软件开发以标准振动台作为执行机构，采用绝对法，进行电涡流传感器的静态和动态校准。经过实验验证电涡流传感器动静态一体化校准系统位移控制精度优于5 μm，位移测量精度优于3 μm，电压测量精度优于0.1%。标准加速度计套组灵敏度校准不确定度在160 Hz内小于0.5%。

Abstract: During long-term use, eddy current sensors may experience significant errors or even erroneous readings due to aging or environmental influences. Therefore, regular dynamic or static calibration is necessary to identify and address any issues. During calibration, the induction plate is made of the same metal conductor material as the sensor under actual operating conditions to ensure the accuracy of the measurement results. The calibration cycle is generally no more than one year. Eddy current sensor calibration is mainly divided into static and dynamic calibration. This paper develops an integrated dynamic and static calibration system for eddy current sensors based on LabVIEW software, using a standard vibration table as the actuator and employing the absolute method for static and dynamic calibration. Experimental results verify that the displacement control accuracy of the integrated dynamic and static calibration system is better than 5 μm, the displacement measurement accuracy is better than 3 μm, and the voltage measurement accuracy is better than 0.1%. The sensitivity calibration uncertainty of the standard accelerometer kit is less than 0.5% within 160 Hz.