基于光栅反馈的电涡流传感器静态校准系统开发

Development of an Automatic Static Calibration System for Eddy Current Sensors Based on Grating Feedback

摘要: 电涡流传感器静态校准装置的发展主要经历了从手动校准模式到半自动校准模式的过程，目前也逐步向自动校准模式发展。但是目前的自动校准模式存在着一定的弊端，计算机技术、虚拟仪器技术、光电技术以及电子技术的快速发展给电涡流传感器静态自动校准模式的发展提供了强大的技术支持。本文就结合计算机技术、虚拟仪器技术、光电技术以及电子技术对电涡流传感器静态自动校准装置进行研究。电涡流传感器自动静态校准装置主要由运动机构，传感器支座，控制器，驱动器、测量光栅以及计算机系统组成。工作时，计算机系统通过RS232串口发出一定的信号，信号经过控制器和驱动器，再实现运动机构的水平直线运动；由位移测量机构发出的位移测量信号经过控制器处理，再传输到计算机中，由光栅尺读取运动机构的位移；被校传感器的信号由数字电压表读得，并经过接口卡输入到计算机系统中，最终得到被测传感器的技术指标。实验验证电涡流传感器静态校准装置的最大位移行程100 mm，位移控制精度0.01 mm，位移测量精度0.003 mm，直流稳压电源的稳定度为0.1%，直流数字电压表的测量不确定度为0.1%，设计满足设计指标的要求。

Abstract: The development of static calibration devices for eddy current sensors has mainly gone through the process from manual calibration mode to semi-automatic calibration mode, and is currently gradually moving towards automatic calibration mode. However, the current automatic calibration mode has certain drawbacks. The rapid development of computer technology, virtual instrument technology, photoelectric technology and electronic technology has provided strong technical support for the development of the automatic static calibration mode of eddy current sensors. This paper studies the static automatic calibration device of eddy current sensors by combining computer technology, virtual instrument technology, photoelectric technology and electronic technology. The automatic static calibration device of eddy current sensors mainly consists of a motion mechanism, a sensor support, a controller, a driver, a measurement grating and a computer system. During operation, the computer system sends certain signals through the RS232 serial port, which are then processed by the controller and driver to achieve the horizontal linear motion of the motion mechanism; the displacement measurement signal sent by the displacement measurement mechanism is processed by the controller and then transmitted to the computer, where the grating ruler reads the displacement of the motion mechanism; the signal of the sensor to be calibrated is read by a digital voltmeter and input into the computer system through an interface card, and finally the technical indicators of the sensor under test are obtained. Experimental verification shows that the maximum displacement stroke of the static calibration device for eddy current sensors is 100 mm, the displacement control accuracy is 0.01 mm, the displacement measurement accuracy is 0.003 mm, the stability of the DC regulated power supply is 0.1%, and the measurement uncertainty of the DC digital voltmeter is 0.1%. The design meets the design requirements.