NiO修饰梯度对金红石相TiO2基MEMS氢敏传感器性能的优化研究
Research on the Optimization of Performance in MEMS Hydrogen-Sensitive Sensors Based on Rutile TiO2 Modified with NiO Gradient
摘要: 针对金红石相TiO2氢敏传感器存在的响应不足及选择性差的问题，本研究通过构建p-n异质结，开发了一种高性能的氢敏材料。采用水热法制备了不同NiO修饰量(1%~8%)的TiO2复合粉末，借助XPS、SEM等表征手段分析其结构形貌，并结合MEMS微热板器件测试气敏性能。结果表明，2% NiO修饰样品在391˚C下对1000 ppm氢气的响应值为金红石相TiO2的1.5倍，且对乙醇、CO等干扰气体具有优异选择性。本研究为高性能氢敏传感器的开发提供了有效的材料优化策略。
Abstract: To address the issues of insufficient response and poor selectivity in rutile-phase TiO2 hydrogen-sensitive sensors, this study developed a high-performance hydrogen-sensitive material by constructing a p-n heterojunction. Titanium dioxide composite powders with varying nickel oxide modification levels (1%~8%) were synthesized via the hydrothermal method. Structural and morphological analyses were conducted using XPS and SEM, while gas-sensing performance was evaluated through MEMS micro-hotplate devices. The results showed that the sample modified with 2% NiO exhibited a hydrogen response 1.5 times higher than that of rutile-phase TiO2 at 391˚C for 1000 ppm hydrogen, along with excellent selectivity against interfering gases such as ethanol and CO. This research provides effective material optimization strategies for the development of high-performance hydrogen-sensitive sensors.
文章引用：刘锦涛, 鲍钰文, 李晓博. NiO修饰梯度对金红石相TiO2基MEMS氢敏传感器性能的优化研究[J]. 材料科学, 2026, 16(1): 129-136. https://doi.org/10.12677/ms.2026.161015

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