《半导体器件物理》课程教学改革与创新

Teaching Reform and Innovation of the Course “Semiconductor Device Physics”

摘要: 集成电路是我国急需重点发展的卡脖子领域之一。其中，《半导体器件物理》课程对于集成电路、微电子和电子科学与技术等学科领域的研究生教育和人才培养至关重要。本文致力于深化学生对半导体材料物理特性、器件基础理论及制造工艺等有关教学问题的理解，为进一步的专业学习和科研活动奠定理论基础。鉴于研究生的专业背景多样性，本文提出了面向研究生的《半导体器件物理》课程教学改革策略。通过改革教学方法，本文旨在提升学生的课堂参与度和自主学习能力，利用人工智能(AI)开启个性化教学，进而提高教学质量，培养符合当前半导体产业和科学研究领域需求的高素质半导体技术人才。

Abstract: Integrated circuits (ICs) are one of the critical “bottleneck” fields that China urgently needs to prioritize for development. Among related disciplines, the course “Semiconductor Device Physics” is crucial for graduate education and talent cultivation in fields such as integrated circuits, microelectronics, and electronic science and technology. This paper aims to deepen students’ understanding of key teaching content, including the physical properties of semiconductor materials, basic device theories, and manufacturing processes, laying a theoretical foundation for their further professional learning and scientific research activities. Given the diverse professional backgrounds of graduate students, this paper proposes teaching reform strategies for the “Semiconductor Device Physics” course tailored to graduate students. By innovating teaching methods, the paper seeks to enhance students’ classroom participation and independent learning abilities, leverage artificial intelligence (AI) to implement personalized teaching, thereby improving teaching quality and cultivating high-quality semiconductor technology talents who meet the demands of the current semiconductor industry and scientific research fields.