石英压电谐振式力学传感芯片——芯片组装与推力测试实验
Quartz Piezoelectric Resonant Force Sensor Chip—Chip Assembly and Thrust Test Experiments
DOI: 10.12677/jsta.2026.142027, PDF,   
作者: 巫晟逸*#, 张 盼, 李 坤, 刘秋实, 丁岗寅, 赵岷江：台晶(宁波)电子有限公司，浙江 宁波；梁佳辉：台晶(宁波)电子有限公司，浙江 宁波；宁波大学机械工程与力学学院，压电器件技术实验室，浙江 宁波；陈庆盈：中国科学院宁波材料技术与工程研究所，先进制造技术研究所，浙江 宁波；赵长春：北京航空航天大学宁波创新研究院，浙江省先进无人飞行系统重点实验室，浙江 宁波
关键词: 石英压电晶体；谐振式；力学传感器；推力测试；Quartz Piezoelectric Crystal； Resonant； Force Sensors； Thrust Test
摘要: 本实验测试石英力学传感芯片(QCR)在不同组成胶材与金属膜条件下，对于压力与推力测试结果的讨论，压力测试结果与胶材固化条件有高相关性，推力测试结果发现其金属镀膜的存在可提高推力上限值，达到了5.641 kgf，对于整体传感器性能的优化有极大帮助。
Abstract: This study examines the pressure and thrust response of a quartz mechanical sensing chip (QCR) under varying adhesive formulations and metal coating conditions. The pressure test outcomes are closely tied to the curing parameters of the adhesive material. In thrust testing, the presence of a metal coating was found to increase the maximum thrust capacity to 5.641 kgf, demonstrating a substantial benefit for overall sensor performance enhancement.
文章引用：巫晟逸, 张盼, 李坤, 刘秋实, 丁岗寅, 梁佳辉, 陈庆盈, 赵长春, 赵岷江. 石英压电谐振式力学传感芯片——芯片组装与推力测试实验[J]. 传感器技术与应用, 2026, 14(2): 269-277. https://doi.org/10.12677/jsta.2026.142027

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