不同缓冲层对柔性AZO薄膜光电性能的影响
Influence of Different Buffer Layers on the Optoelectronic Properties of AZO Thin Films
摘要: 采用中频反应磁控溅射法在柔性PET衬底上分别添加TiO2、SnO2和ZnO等缓冲层，室温沉积了掺杂铝的氧化锌薄膜(AZO)。通过对薄膜Hall性质分析以及紫外–可见光吸收特性分析，研究了不同缓冲层以及反应溅射氩氧比对薄膜性能的影响，获得优化的参数。研究结果表明，添加缓冲层可以有效改善柔性AZO薄膜的电学性质，在SnO2缓冲层上5:1氩氧比下生长的柔性AZO薄膜光电性能提高最为显著，薄膜电阻率大幅降低，可见光区域平均透过率超过85%。
Abstract: AZO films with TiO2, SnO2 and ZnO buffer layers were deposited on flexible PET substrates by in-termediate frequency reaction magnetron sputtering method at room temperature. The effects of different buffer layers and Ar/O2 gas ratio on the electrical and optical properties of AZO films were investigated by Hall effect and UV-Vis spectrophotometer analysis. The results indicated that all the buffer layers improve the electrical properties of the flexible AZO thin films. The AZO thin film with SnO2 buffer layer deposited Ar/O2 ratio of 5:1 exhibits a significant decrease in the resistivity and the average optical transmittance of more than 85% in the visible range.
文章引用：陈甲, 李林骏, 张力江, 束智杰, 陈成, 陆慧. 不同缓冲层对柔性AZO薄膜光电性能的影响[J]. 材料科学, 2018, 8(6): 718-725. https://doi.org/10.12677/MS.2018.86085

参考文献

[1] Zhu, Y., Wang, Y., Wan, P.F., et al. (2012) Optical and Mechanical Properties of Transparent Conductive Al-Doped ZnO Films Deposited by the Sputtering Method. Chinese Physics Letters, 29, Article ID: 038103, 1-4.
[Google Scholar] [CrossRef] 
[2] Wang, X.J., Wang, H., Zhou, W.L., et al. (2011) Prepara-tion and Character of Textured ZnO:Al Thin Films Deposited on Flexible Substrates by RF Magnetron Sputtering. Materials Letters, 65, 2039.
[Google Scholar] [CrossRef] 
[3] Fortunato, E., Goncalves, A., Assuncao, V., et al. (2003) Growth of ZnO:Ga Thin Films at Room Temperature on Polymeric Substrates: Thickness Dependence. Thin Solid Films, 442, 121-126.
[Google Scholar] [CrossRef] 
[4] 宋继中, 贺英, 朱棣, 等. 柔性光电器件发光层用ZnO微纳阵列/聚合物复合材料[J]. 物理化学学报, 2011, 27(5): 1207-1213.
[5] Chung, Y.M., Moon, C.S., Jung, M.J., et al. (2005) The Low Temperature Synthesis of Al Doped ZnO Films on Glass and Polymer Using Magnetron Co-Sputtering: Working Pressure Effect. Surface and Coatings Technology, 200, 936-939.
[Google Scholar] [CrossRef] 
[6] Hu, A.Z., Wu, F., Liu, J.P., et al. (2010) Density- and Adhe-sion-Controlled ZnO Nanorod Arrays on the ITO Flexible Substrates and Their Electrochromic Performance. Journal of Alloys and Compounds, 507, 261-266.
[Google Scholar] [CrossRef] 
[7] Chen, Z., Li, S.J. and Zhang, W.F. (2013) Pulse Electrodep-osition of ZnO/SnO2 Composite Films: Growth Mechanism, Structural and Optical Studies. Journal of Alloys and Compounds, 557, 274-278.
[Google Scholar] [CrossRef] 
[8] Lin, Y.C., Chen, M.Z., Kuo, C.C., et al. (2009) Electrical and Optical Properties of ZnO:Al Film Prepared on Polyethersulfone Substrate by RF Magnetron Sputtering. Colloids and Surfaces A: Physicochemical and Engineering Aspects, 337, 52-56.
[Google Scholar] [CrossRef] 
[9] Hao, X.T., Ma, J., Zhang, D.H., et al. (2002) Thickness De-pendence of Structural, Optical, Electrical Properties of ZnO:Al Films Prepared on Flexible Substrates. Applied Surface Science, 189, 18-23.
[Google Scholar] [CrossRef] 
[10] Guo, T.T., Dong, G.B., Gao, F.Y., et al. (2013) High Per-formance ZnO:Al Films Deposited on PET Substrates Using Facing Target Sputtering. Applied Surface Science, 282, 467-471.
[Google Scholar] [CrossRef] 
[11] Wang, X.J., Wang, H., Zhou, W.L., et al. (2011) Preparation and Character of Textured ZnO:Al Thin Films Deposited on Flexible Substrates by RF Magnetron Sputtering. Materials Letters, 65, 2039-2042.
[Google Scholar] [CrossRef] 
[12] Lee, J., Lee, Do., Lim, D., et al. (2007) Structural, Electrical and Optical Properties of ZnO:Al Films Deposited on Flexible Organic Substrates for Solar Cell Applications. Thin Solid Films, 515, 6094-6098.
[Google Scholar] [CrossRef] 
[13] Cao, W.T. and Du, W.M. (2007) Strong Exciton Emission from ZnO Microcrystal Formed by Continuous 532 nm Laser Irradiation. Journal of Luminescence, 124, 260-264.
[Google Scholar] [CrossRef] 
[14] Hong, R.J., Wei, C.Y., He, H.B., et al. (2005) Influences of CO2 Laser Irradiation on the Structure and Photoluminescence of Zinc Oxide Thin Films. Thin Solid Films, 485, 262-266.
[Google Scholar] [CrossRef] 
[15] 赵艳, 蒋毅坚. ZnO薄膜的激光辐照效应研究[J]. 物理学报, 2010, 59(4): 2679-2684.
[16] Hong, R.J., Jiang, X., Szyszka, B., et al. (2003) Studies on ZnO:Al Thin Films Deposited by In-Line Reactive Mid-Frequency Magnetron Sputtering. Applied Surface Science, 207, 341-350.
[Google Scholar] [CrossRef] 

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