SiOx(C)/SiNx双层减反膜太阳电池LPD技术生产应用可行性分析

Feasibility Analysis on Industrialization of LPD Technology for Silicon Solar Cells with SIO(C)/SiNx Dual-Layer Anti-Reflectance Coating

摘要: 本文对LPD技术制备SiOx(C)/SiNx双层减反射膜太阳电池进行生产实验研究，分析LPD技术在生产上应用的可行性。结果表明，SiOx(C)/SiNx双层减反射膜能够使多晶硅太阳电池转换效率提升0.08%~0.15% (abs.)。技术实现过程易造成表面摩擦损伤形成并联漏电，从而抑制太阳电池转换效率的提升。LPD制备的SiOx(C)/SiNx双层减反射膜太阳电池组件串联电阻较高，组件封装功率损失为3.38%。LPD技术制备SiOx(C)/SiNx双层减反射膜太阳电池具有更低表面反射率和更高的转换效率，但欲在生产中使用，需攻克摩擦损伤，同时避免SiOx(C)膜沉积在电极上。

Abstract: Multi-crystalline silicon (mc-Si) solar cells with SiO(C)/SiNx dual-layer anti-reflectance coating film were fabricated on the production line via liquid phase deposition (LPD) method. The con-version efficiency of the cells rises 0.08%~0.15% (abs.), which is lower than the expected. The cell property shows a higher current leakage which rises nearly 10%. The shunt resistance is lower, however, because of the scratching during the fabrication progress of SiO(C) film. Module is also obtained on the production line. Cell to module power loss is 3.38% due to the higher series resistance. As shown in this paper, cell conversion efficiency with SiO(C)/SiNx dual-layer is better compared with SiNx films, after the SiO(C) film deposition and annealing. And the surface reflectivity is also improved. But, there are two weaknesses which should be avoided: one is scratching; another one is that the electrodes are covered by SiO(C) film.