尺寸参数对AT切石英晶体谐振器影响的三维有限元仿真
Three-Dimensional Finite Element Simulation of the Influence of Size Parameters on AT Cut Quartz Crystal Resonator
摘要: 本文以4 MHz圆形AT切晶体谐振器为例，通过ANSYS软件建立了三维有限元模型，分别完成了对该晶体谐振器的石英晶片的直径、石英晶片的厚度和电极的直径的仿真，研究这些尺寸参数对于谐振器厚度剪切振动模态和频率造成的影响，对于圆形AT切晶体谐振器的设计制造起到了一定的指导作用。
Abstract: Taking the 4 MHz circular AT cut crystal resonator as an example, this paper establishes a three-dimensional finite element model through ANSYS. The diameter of the quartz wafer, the thickness of the quartz wafer and the diameter of the electrode of the crystal resonator are simulated and analyzed respectively, and the effects of these size parameters on the thickness shear vibration mode and frequency of the resonator are studied, which plays a certain guiding role in the design and manufacture of the circular AT cut crystal resonator.
文章引用：刘宁欣, 付小宁. 尺寸参数对AT切石英晶体谐振器影响的三维有限元仿真[J]. 应用物理, 2022, 12(3): 137-148. https://doi.org/10.12677/APP.2022.123016

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