绝缘体上硅为平台的氮氧化硅波导及马赫–泽德尔干涉仪结构的研究
Study on Silicon Oxynitride Waveguide and Mach-Zehnder Interferometer Structure on Silicon-on-Insulator Platform
摘要: 绝缘体上硅(silicon-on-insulator, SOI)作为光波导的技术平台已在有源和无源光子集成器件中表现出巨大优势。然而，SOI波导过大的折射率差决定了非对称性的很小波导几何尺寸，从而造成较大的光传输损耗、光学耦合与干涉器件过大的偏振相关性和过大的波导–光纤耦合损耗等固有缺陷。本文研究了SOI上以氮氧化硅为芯层氧化硅为包层的波导(简称为氮氧化硅波导)单模条件及由此构成的马赫–泽德尔(MZI)结构，建立了计算光损耗的理论模型。首先，对单模氮氧化硅波导的有效折射率范围和尺寸范围进行了确定，进而对氮氧化硅的直接耦合(DC)型耦合器的传输损耗和耦合区长度Lc的影响进行了系统性模拟，并对MZI结构进行了研究。
Abstract: As a technology platform of optical waveguides, silicon-on-insulator (SOI) has shown great advantages in active and passive photonic integrated devices. However, the large refractive index difference of SOI waveguide determines the small geometrical size of the asymmetric waveguide, which leads to inherent defects such as high optical loss, high polarization dependence, and waveguide-fiber coupling loss. In this paper, both the single-mode condition and the Mach-Zehnder interferometer (MZI) construction of SOI waveguide with silicon oxynitride as core layer and silicon dioxide as cladding layer, which is simply called oxynitride waveguides, are studied, and the theoretical model is established. Then, the effective refractive index range and the other physical parameters of single-mode oxynitride waveguide are determined. Furthermore, the optical propagation loss of waveguides and its influence on the coupling zone length Lc of the directional coupler (DC) are systematically simulated, and the optical loss performance of MZI construction is investigated.
文章引用：崔航, 孙德贵. 绝缘体上硅为平台的氮氧化硅波导及马赫–泽德尔干涉仪结构的研究[J]. 传感器技术与应用, 2022, 10(2): 169-176. https://doi.org/10.12677/JSTA.2022.102021

参考文献

[1] Doerr, C.R. and Okamoto, K. (2008) Planar Lightwave Circuits in Fiber-Optic Communications. In: Kaminow, I.P., Li, T. and Willner, A.E., Eds., Optical Fiber Telecommunications, Academic Press, Cambridge, 269-341. [Google Scholar] [CrossRef] 
[2] Murphy, E.J. (1999) Integrated Optical Circuits and Components: Design and Applications. CRC Press, Boca Raton.
[3] Chrostowski, L. and Hochberg, M. (2015) Silicon Photonics Design: From Devices to Systems. Cambridge University Press, Cambridge. [Google Scholar] [CrossRef] 
[4] Orcutt, J.S., Moss, B., Sun, C., Leu, J., Georgas, M., Shainline, J., et al. (2012) Open Foundry Platform for High-Performance Electronic-Photonic Integration. Optics Express, 20, 12222-12232. [Google Scholar] [CrossRef] 
[5] Dumon, P., Bogaerts, W., Wiaux, V., Wouters, J., Beckx, S., Van Campenhout, J., et al. (2004) Low-Loss SOI Photonic Wires and Ring Resonators Fabricated with Deep UV Lithogra-phy. IEEE Photonics Technology Letters, 16, 1328-1330. [Google Scholar] [CrossRef] 
[6] Tsuchi-zawa, T., Yamada, K., Fukuda, H., Watanabe, T., Takahashi, J., Takahashi, M., et al. (2005) Microphotonics Devices Based on Silicon Microfabrication Technology (Invited Paper). IEEE Journal of Selected Topics in Quantum Electronics, 11, 232-240. [Google Scholar] [CrossRef] 
[7] Marcuse, D. (2014) Radiation Losses of Dielectric Waveguides in Terms of the Power Spectrum of the Wall Distortion Function. Bell System Technical Journal, 48, 3233-3242. [Google Scholar] [CrossRef] 
[8] Payne, F.P. and Lacey, J. (1994) A Theoret-ical Analysis of Scattering Loss from Planar Optical Waveguides. Optical and Quantum Electronics, 26, 977-986. [Google Scholar] [CrossRef] 
[9] Barwicz, T. (2005) Three-Dimensional Analysis of Scattering Losses Due to Sidewall Roughness in Microphotonic Waveguides. Conference on Lasers and Electro-Optics, Baltimore, 22-27 May 2005, 1333-1335. [Google Scholar] [CrossRef] 
[10] Poulton, C.G., Koos, C., Fujii, M., Pfrang, A., Schimmel, T., Leuthold, J., et al. (2006) Radiation Modes and Roughness Loss in High Index-Contrast Waveguides. IEEE Journal of Selected Topics in Quantum Electronics, 12, 1306-1321. [Google Scholar] [CrossRef] 
[11] Shang, H.P., Sun, D.G., Yu, P., Wang, B., Yu, T., Li, T. and Jiang, H. (2020) Investigation for Sidewall Roughness Caused Optical Scatting Loss of Silicon-on-Insulator Waveguides with Confocal Laser Scanning Microscopy. Coatings, 10, Article No. 236. [Google Scholar] [CrossRef] 
[12] Sun, D.G., Hu, Z.M., Abdule-Majid, S., Vandusen, R., Zheng, Z., Hasan, I., Tarr, N.G., Bidnyk, S. and Hall, T.J. (2011) Limitation Factor Analysis for Silicon-on-Insulator Waveguide Mack-Zehnder Interference Based Electrooptic Switches. Journal of Lightwave Technology, 29, 2592-2600. [Google Scholar] [CrossRef] 
[13] Papadimitriou, G.I., Papazoglou, C. and Pomportsis, A.S. (2003) Optical Switching: Switch Fabrics, Techniques, and Architectures. Journal of Lightwave Technology, 21, 384-405. [Google Scholar] [CrossRef] 
[14] Nagai, S., Morishima, G., Inayoshi, H. and Utaka, K. (2002) Mul-timode Interference Photonic Switches (MIPS). Journal of Lightwave Technology, 20, 675-681. [Google Scholar] [CrossRef] 
[15] Sun, D.G., Zha, Y., Liu, T., Zhang, Y., Li, X. and Fu, X. (2007) Demon-stration for Rearrangeable Nonblocking 8 × 8 Matrix Optical Switches Based on Extended Banyan Networks. Optics Express, 15, 9347-9356. [Google Scholar] [CrossRef] 
[16] Van Campenhout, J., Green, W.M., Assefa, S. and Vlasov, Y.A. (2009) Low-Power, 2 × 2 Silicon Electro-Optic Switch with 110-nm Bandwidth for Broadband Reconfigurable Optical Networks. Optics Express, 17, 24020-24029. [Google Scholar] [CrossRef] 
[17] Soref, R. (2017) Design of Low-Energy On-Chip Electro-Optical 1 × M Wavelength-Selective Switches. Photonics Research, 5, 340-345. [Google Scholar] [CrossRef] 
[18] Cheng, Q., Bahadori, M., Glick, M., Rumley, S. and Bergman, K. (2018) Recent Advances in Optical Technologies for Data Centers: A Review. Optica, 5, 1354-1370. [Google Scholar] [CrossRef] 

为你推荐