高精度压阻式触觉传感器设计应用与研究

Design Application and Research of High Precision Piezoresistive Tactile Sensor

摘要: 随着智能技术的飞速发展，触觉传感器作为传感装置构成了智能系统的核心基础。能感受各种刺激的生物器官在人与外界环境的相互作用中起着至关重要的作用。本研究呈现一压阻式纳米复合橡胶弹性体的可挠式触觉传感器，以纳米碳黑粉末(Carbon-black)填充于聚甲基硅氧烷(PDMS)高分子材料，经溶剂润湿法(n-Hexane)改善其均匀与分散性，形成导电高分子纳米复合材料(C-PDMS)，使其具有电的物理特性。此C-PDMS纳米复合材料由大面积铸模成型制造与多层堆栈方式整合镶埋于PDMS高分子基材中，并沉积金属薄膜，作为电性连接与电极，其金属薄膜与高分子间界面以3-硫丙基三甲氧基硅烷(MPTMS)表面改质处理形成附着层，以增加金属膜的附着与可用性。此传感器藉由施以正向力造成应变测量电阻率之变化，其灵敏度于平坦表面上为2.92%~4.45% (ΔR/R0/mN)，于弯曲表面上(r = 2.25 cm)为0.92%~0.98% (ΔR/R0/mN)。本研究提出之压阻式纳米复合橡胶弹性体可用于挠曲式可挠式触觉感测元件，并实现了整合于力量感测、触控与穿戴式等应用领域。

Abstract: With the rapid development of intelligent technology, tactile sensors as sensing devices form the core foundation of intelligent systems. Biological organs that can sense various stimuli play a crucial role in the interaction between humans and the external environment. In this study, a piezo-resistive nano-composite rubber elastomer is used to form a conductive polymer nanocomposite (C-PDMS) with nano-carbon-black powder filled with polydimethylsiloxane (PDMS) polymer and improved homogeneity and dispersion by solvent wetting (n-Hexane). The C-PDMS nanocomposite is fabricated by large-area casting and embedded in a PDMS polymer substrate by multi-layer stacking, and a gold thin film is deposited for electrical connection and electrode. The sensitivity of this sensor is 2.92%~4.45% (ΔR/R0/mN) on a flat surface and 0.92%~0.98% (ΔR/R0/mN) on a curved surface (r = 2.25 cm) by applying a positive force to the strain measurement resistivity. The proposed piezoresistive nanocomposite rubber elastomers can be used for flexural and flexible haptic sensing elements, and can be implemented and integrated into force sensing, touch and wearable applications.