La掺杂对不同Zr/Ti梯度锆钛酸铅薄膜性能的影响
Effects of La Doping on the Properties of Different Zr/Ti Gradient Lead Zirconate Titanate Thin Films
DOI: 10.12677/MS.2022.125049, PDF,   
作者: 张 帅, 杨志峰, 邹赫麟*：大连理工大学，辽宁 大连
关键词: 浓度梯度；PZT薄膜；La掺杂；溶胶凝胶；Concentration Gradient； PZT Film； La Doping； Sol-Gel
摘要: 本文基于溶胶凝胶法在Pt(111)/Ti/SiO2/Si(100)基底上，利用自发的离子扩散效应，采用梯度补偿的方法制备了不同梯度的PZT薄膜，同时研究了镧掺杂对不同梯度锆钛酸铅薄膜的晶向结构、微观形貌、介电性能、铁电性能以及疲劳性能的影响。XRD图谱显示无掺杂的单层薄膜和无梯度薄膜均呈现(100)取向，而梯度增强薄膜呈现随机取向，掺杂的PZT薄膜(100)取向被抑制，SEM结果分析表明样品为完全的钙钛矿结构，无梯度薄膜具有更高的介电系数，掺杂明显提高了介电系数，达到了1196.2，剩余极化强度得到改善，2Pr达到了26.21 μC/cm2，此时的矫顽场强Ec为44.4 kV/cm，疲劳测试结果表明，掺杂的无梯度薄膜疲劳性能得到了明显改善。
Abstract: Lead zirconate titanate PbZrxTi1-xO3 (PZT) films with different Zr/Ti gradients were prepared on Pt(111)/Ti/SiO2/Si(100) substrates via sol-gel method based on spontaneous ion diffusion effects. The effects of lanthanum doping on the crystal orientation structure, microstructure, dielectric properties, ferroelectric properties, and fatigue properties of the films with different gradients were studied. X-ray diffraction (XRD) shows that both single-layer films and gradient-free films exhibited (100) orientation, while random orientation is observed in gradient-enhanced films. Scanning electron microscope (SEM) analysis detected dense perovskite structures in the samples. Gradient-free film shows the higher dielectric coefficients, which are also improved significantly by doping, reaching 1196.2. Moreover, the better ferroelectric properties with a residual polarization strength of 26.21 μC/cm2 and a coercive field strength of 44.4 kV/cm are obtained in the gradient-free film. The fatigue test results show that the fatigue performance of the doped gradient-free film has been significantly improved.
文章引用：张帅, 杨志峰, 邹赫麟. La掺杂对不同Zr/Ti梯度锆钛酸铅薄膜性能的影响[J]. 材料科学, 2022, 12(5): 465-473. https://doi.org/10.12677/MS.2022.125049

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