MEMS传感器发展及在综合备份显示系统的应用

Development of MEMS Sensors and Their Application in Integrated Backup Display System

摘要: MEMS传感器是一种利用微电子制造技术和微机械加工制造技术实现的微型器件。随着MEMS技术的不断发展，MEMS传感器在不同领域应用发展迅速，已经逐步取代了传统的传感器，尤其在消费电子产品、汽车工业、航空航天、机械、化工及医药等领域应用越来越广泛。本文研究分析了在MEMS传感器在这些领域主要应用场景、特点和优势。通过研究传统备份仪表的系统架构、功能作用，结合MEMS传感器的功能及结构特点，很好地应用到综合备份飞行显示系统设计中，最终设计出轻量化、小型化和集成化的综合备份飞行显示系统。目前配备MEMS传感器综合备份飞行显示系统越来越多地应用到不同类型的飞机上，逐步替代传统的备份高度表、空速表和水平仪。

Abstract: MEMS sensor is a kind of micro device realized by microelectronic manufacturing technology and micromachining manufacturing technology. With the development of MEMS technology, the application of MEMS sensors in different fields has developed rapidly, and has gradually replaced the traditional sensors, especially in consumer electronics, automotive industry, aerospace, machinery, chemical industry, medicine and other fields. This paper studies and analyzes the main application scenarios, characteristics and advantages of MEMS sensors in these fields. By studying the system architecture and function of the traditional backup instrument, combined with METhe function and structure characteristics of MS sensor are well applied to the design of integrated backup flight display system, and finally a lightweight, miniaturized and integrated integrated backup flight display system is designed. At present, that integrate backup flight display system equipped with the MEMS sensor is more and more applied to different type of aircrafts and gradually replaces the traditional backup altimeter, airspeed indicator and level indicator.