Moreira, M.A., Trndahl, T., Katardjiev, I., et al. (2015) Deposition of Highly Textured AlN Thin Films by Reactive High Power Impulse Magnetron Sputtering. Journal of Vacuum Science & Technology A, 33, Article ID: 021518.

相关文章:
在线客服:
对外合作:
联系方式:400-6379-560
投诉建议:feedback@hanspub.org
客服号

人工客服,优惠资讯,稿件咨询
公众号

科技前沿与学术知识分享